Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing
نویسندگان
چکیده
Manufacturing intelligence for early warning of key equipment excursion for advanced equipment control in semiconductor manufacturing Chia-Yu Hsu, Chen-Fu Chien* and Pei-Nong Chen Department of Information Management, Yuan Ze University, 135 Yuan-Tung Road, Chungli 32003, Taiwan, Republic of China; Department of Industrial Engineering and Engineering Management, National Tsing Hua University, 101 Section 2 Kuang Fu Road, Hsinchu 30043, Taiwan, Republic of China
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