Stress nature investigation on heteroepitaxial 3C–SiC film on (100) Si substrates
نویسندگان
چکیده
Alex A. Volinsky Department of Mechanical Engineering, University of South Florida Tampa, Florida 33620 Stephen E. Saddow Department of Electrical Engineering, University of South Florida, Tampa, Florida 33620; and Department of Molecular Pharmacology and Physiology, University of South Florida, Tampa, Florida 33620 Francesco La Via IMM-CNR, sezione di Catania, Stradale Primosole 50, 95121, Catania, Italy
منابع مشابه
Growth of Highly C-axis Oriented Aln Films on 3c-sic/si Substrate
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