Polysilicon photonic resonators for large-scale 3D integration of optical networks.
نویسندگان
چکیده
We demonstrate optical microresonators in polycrystalline silicon with quality factors of 20,000. We also demonstrate polycrystalline resonators vertically coupled to crystalline silicon waveguides. Electrically active photonic structures fabricated in deposited polysilicon layers would enable the large-scale integration of photonics with current CMOS microelectronics.
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ورودعنوان ژورنال:
- Optics express
دوره 15 25 شماره
صفحات -
تاریخ انتشار 2007