Process Optimisation of Thick UV-patternable Hybrid Sol-gel Coating Development
نویسندگان
چکیده
We report on the fabrication and characterization of thick UV-patternable hybrid sol-gel films by spin coating using a modified sol-gel process. Thick coating of 25 microns with crack-free surface can be produced by one spin coating step. Thick layers of more than 100 μm can be obtained with a multi-coating process. Characterization using different techniques including optical microscope and atomic force microscope shows both a smooth surface of optical quality and precise patterns. Parameters for hybrid sol-gel coating preparation, photolithography processing including prebaking, exposure, development and postbaking were studied in detail.
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