Silicon-Processed Microneedles
نویسندگان
چکیده
A combination of surfaceand bulk-micromachining techniques is used to demonstrate the feasibility of fabricating microhypodermic needles. These microneedles, which may be built with on-board fluid pumps, have potential applications in the chemical and biomedical fields for localized chemical analysis, programmable drug-delivery systems, and very small, precise sampling of fluids. The microneedles are fabricated in 1, 3, and 6 mm lengths with fully enclosed channels formed of silicon nitride. The channels are 9 m in height and have one of two widths, 30 or 50 m. Access to the channels is provided at their shank and distal ends through 40m square apertures in the overlying silicon nitride layer. The microneedles are found to be intact and undamaged following repetitive insertion into and removal from animal-muscle tissue (porterhouse steak). [379]
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