A piezo-mechanical characterization of PZT thick films screen-printed on alumina substrate
نویسندگان
چکیده
Thick soft and hard lead zirconate titanate (PZT) films are fabricated on alumina substrates using the screen-printing technique. The geometries of the substrates are suited to three different mechanical characterization tests devoted to the determination of the Young’s modulus of the films: a dynamic, a quasi-static and a nanoindentation test. Values of 52 8 and 20 7 GPa for the Young’s modulus are, respectively calculated for the softand hard-PZT. These values are strongly influenced by porosity in the films. The piezoelectric coefficient d31 is also investigated. It is found to be near 120 5 pC/N for the soft-PZT and it is close to 25 3 pC/N for the hard-PZT. Motivated by experimental observations, a non-linear piezo-mechanical model predicting the electromechanical behavior of a cantilever bimorph is developed. # 2002 Elsevier Science B.V. All rights reserved.
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