Microstructure electrodes as a means of creating uniform discharges at atmospheric pressure
نویسندگان
چکیده
Large-area direct current (DC) discharges were generated using planar microelectrode arrays (MEAs) with electrode distances between 50 and 250mm. A homogenous diffuse light emission with a typical thickness of approximately 0.5– 1.5mm was observed. The discharge can be operated over a wide pressure range with sustaining voltages of only a few 100V DC and showed the characteristics of a normal glow discharge. Possible areas of application of the MEA were surface modification of materials, plasma chemistry, pollution control and as light sources. The discharge was characterized via optical emission spectroscopy (OES). The temperature of excited species in the discharge was derived from OH emission spectra. A temperature of about 3000K was calculated. Laser-induced fluorescence (LIF) spectra of NO (AS’XP1/2) in the ground state indicated that the gas temperature of the discharge was only a few ten degrees above room temperature. r 2002 Elsevier Science Ltd. All rights reserved.
منابع مشابه
Effects of interface between dielectric barrier and electrode on homogeneous barrier discharges at atmospheric pressure
Generally the discharge in a dielectric barrier arrangement consists of a great number of filaments in parallel. It has been shown in the past that barrier discharges without filaments could also be established in special electrode arrangements and in limited working domains at atmospheric pressure. Further it was shown that a reliable control of such discharges in a cheap gas like nitrogen is ...
متن کاملThe development of uniform atmospheric pressure glow discharges: appearance of stable glow discharge in air, argon, oxygen and nitrogen at atmospheric pressure using a 50 Hz source (S Okazaki et al 1993 J. Phys. D: Appl. Phys. 26 889)
The development of atmospheric pressure plasmas (APPs) for chemical synthesis, mat erials processing, environmental cleanup and now for biotechnology has been continually challenged by the desire, and the need, to produce uniform glow discharges. A scaling law in low temperature plasmas states that if ionization occurs only from the ground state, the gas density N is constant, and the E/N (ele...
متن کاملPlasma-Assisted Deposition at Atmospheric Pressure
In plasma-assisted deposition methods the activation energy necessary for the initiation of chemical reactions is transferred via charged particles. Due to this fact in many cases the process temperature can be kept small, if gas discharges at pressures below 1 hPa are used. On the other hand low pressure requires a great deal of vacuum equipment. Processes at atmospheric pressure are more favo...
متن کاملScaled-up Nonequilibrium Air Plasmas
The volume scalability of nonequilibrium plasmas produced by electrical discharges in atmospheric pressure air has been investigated. A variety of direct current (DC) and pulsed glow discharges obtained in either slow flow of ambient or fast flow of preheated (~2000 K) air at atmospheric pressure is presented. Single DC and repetitively pulsed discharges represent the first approach. Stable dis...
متن کاملElectron kinetics in radio-frequency atmospheric-pressure microplasmas.
The kinetic study of three radio-frequency atmospheric-pressure helium microdischarges indicates that the electron energy probability function is far from equilibrium, and three electron groups with three distinct temperatures are identified. The relative population of electrons in different energy regions is strongly time modulated and differs significantly from values recently reported from f...
متن کامل