Inverse diffraction grating of Maxwell's equations in biperiodic structures.

Consider a time-harmonic electromagnetic plane wave incident on a perfectly conducting biperiodic surface (crossed grating). The diffraction is modeled as a boundary value problem for the three-dimensional Maxwell equation. The surface is assumed to be a small and smooth deformation of a planar surface. In this paper, a novel approach is developed to solve the inverse diffraction grating problem in the near-field regime, which is to reconstruct the surface with resolution beyond Rayleigh's criterion. The method requires only a single incident field with one polarization, one frequency, and one incident direction, and is realized by using the fast Fourier transform. Numerical results show that the method is simple, efficient, and stable to reconstruct biperiodic surfaces with subwavelength resolution.