An Introduction to Lithography
نویسنده
چکیده
VLSI devices consist of highly complicated and dense circuit patterns. Lithography is the process by which the circuit patterns are transferred on to the semiconductor wafer, and current techniques can offer resolutions of around 100nm. However, as demand increases for smaller devices, the resolution offered by current techniques will not be satisfactory. We will look at current techniques, the theory behind them and how they can be improved. We will also consider the other options open to the industry as we move into the 21 st century. The systems under development will lead, in around 2014, to nanometer-scale devices for which we must consider quantum effects.
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