Design and performance analysis of thermally actuated MEMS circuit breakers
نویسنده
چکیده
The use of MEMS electrical switches as miniature electrically resettable circuit breakers is described. A prototype based on nickel thermal actuators on silicon has been fabricated and tested, and thermo-mechanical analysis is presented showing the relation between design parameters and performance. Temperature dependence of trip current is shown to be below 0.2% K−1, and analysis is presented indicating that variation of resistivity is the main cause. Trip time, and its dependence on over-current level, is analysed and the results compared with measurements.
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Thermally Tripped Mems Circuit Breakers
The use of MEMS electrical switches as miniature electrically resettable circuit breakers is described. A prototype based on nickel thermal actuators on silicon has been fabricated and tested, and the performance is compared to analytical models. Trip currents of ≈ 300 mA are obtained, with trip times less than 50 ms. Temperature dependence of trip current is shown to be below 0.2%/K. The rel...
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