A way to implement the electro-optical technique to inertial MEMS
نویسندگان
چکیده
Article history: Received 1 June 2015 Received in revised form 22 July 2015 Accepted 22 July 2015 Available online xxxx
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ورودعنوان ژورنال:
- Microelectronics Reliability
دوره 55 شماره
صفحات -
تاریخ انتشار 2015