A way to implement the electro-optical technique to inertial MEMS

نویسندگان

  • K. Melendez
  • A. Desmoulin
  • Kevin Sanchez
  • Philippe Perdu
  • Dean Lewis
چکیده

Article history: Received 1 June 2015 Received in revised form 22 July 2015 Accepted 22 July 2015 Available online xxxx

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عنوان ژورنال:
  • Microelectronics Reliability

دوره 55  شماره 

صفحات  -

تاریخ انتشار 2015