High Voltage Driver Design for Actuating a MOEMS Mirror Array
نویسندگان
چکیده
In this paper we present a new multichannel high voltage driver box to connect up to six MOEMS mirror devices to it that have resonant and also quasistatically driven actuating electrodes. It is possible to drive all resonant axes synchronously while the amplitude of them can individually be controlled by separate microcontrollers that also operate the quasistatic axes. Circuit simulations are compared with the measurements done on the real system and also show the robust driving performance of a MOEMS mirror. Keywords— MOEMS, scanner mirror, electrostatic driver.
منابع مشابه
Imaging with two-axis micromirrors
We demonstrate a means of creating a digital image by using a two axis tilt micromirror to scan a scene. For each different orientation we extract a single grayscale value from the mirror and combine them to form a single composite image. This allows one to choose the distribution of the samples, and so in principle a variable resolution image could be created. We demonstrate this ability to co...
متن کاملUltra-low-power multiplexed electronic driver for high resolution deformable mirror systems
We present a new multiplexed high-voltage driver architecture that departs from previous MEMS deformable-mirror drivers. Just one D/A converter and one high-voltage amplifier module drive the entire actuator array through a rowcolumn addressing scheme. This approach reduces operational power consumption of a multiple-channel deformablemirror driver by two orders of magnitude. It can provide for...
متن کاملTitle of Dissertation : OPTIMAL MEMS PLATE DESIGN AND CONTROL FOR LARGE CHANNEL COUNT OPTICAL
Title of Dissertation: OPTIMAL MEMS PLATE DESIGN AND CONTROL FOR LARGE CHANNEL COUNT OPTICAL SWITCHES Yuan Ma, Doctor of Philosophy, 2004 Dissertation Directed By: Professor Robert W. Newcomb, Department of Electrical and Computer Engineering The design and control of an optimal mirror plate actuator suitable for large channel count MEMS optical switch applications is researched. An optimal pla...
متن کاملStudy on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector
A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two deg...
متن کاملDesign and Analysis of New Level Shifter With Gate Driver for Li-Ion Battery Charger in 180nm CMOS Technology
In this work, the design and analysis of new Level Shifter with Gate Driver for Li-Ion battery charger is proposed for high speed and low area in 180nm CMOS technology. The new proposed level shifter is used to raise the voltage level and significantly reduces transfer delay 1.3ns (transfer delay of conventional level shifter) to 0.15ns with the same input signal. Also, the level shifter with g...
متن کامل