Fabrication of a Biomimetic Corrugated Polysilicon Diaphragm with Attached Single Crystal Silicon Proof Masses
نویسندگان
چکیده
This paper reports a new approach to the fabrication of 3D structured diaphragms using integrated surface and deep reactive ion etching (DRIE) bulk silicon micromachining on a silicon-on-insulator (SOI) wafer. The fabrication process has been applied to a 1 mm × 2 mm × 1.2 μm diaphragm designed for a biomimetic directional microphone. The membrane has two 200 μm × 380 μm × 20 μm silicon proof masses, solid stiffeners, and a 20 μm deep corrugation. Acoustic measurements of the diaphragm using laser vibrometry have demonstrated high directional sensitivity of the device.
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