Scope of Vhf Plasma Deposition for Thin-film Silicon Solar Cells
نویسنده
چکیده
The world-wide attempts in obtaining thin-film crystalline silicon are reviewed. Based on literature published sofar, it appears that high-temperature manufacturing steps seem to be unavoidable for obtaining high conversion efficiencies of crystalline silicon based solar cells. High process temperatures are in contradiction for the use of low-cost substrates like e.g. glass or aluminium. Such substrates, however, are essential for obtaining low module manufacturing costs. The Very High Frequency Glow Discharge Process (VHF-GD) could have the potential to overcome the temperature efficiency contradiction.
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