CHARACTERIZATION OF PIEZOELECTRICALLY ACTUATED PLD Pb(Zr,Ti)O3 THIN FILM MEMBRANES
نویسندگان
چکیده
In our previous work, we presented a novel technique for fabricating Transmission Electron Microscopy (TEM) chips in order to investigate structural and piezoelectric properties of Pulsed Laser Deposited (PLD) Lead Zirconium Titanate (Pb(Zr,Ti)O3) (PZT) thin films [1]. We accomplished the fabrication of the devices we presented last year and obtained fully functional PLD PZT membranes. In this paper, we present the results of the fabrication process, which involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. In addition, we demonstrate the functionality of the membranes by piezoelectric actuation and characterized a selected membrane design through a set of experiments including X-ray diffraction (XRD), residual stress and frequency analyses.
منابع مشابه
TOWARDS IN-SITU TEM ANALYSIS OF PLD Pb(Zr,Ti)O3 THIN FILM MEMBRANES
In this paper, a novel technique for fabricating Transmission Electron Microscopy (TEM) chips for investigating structural and piezoelectric properties of Pulse Laser Deposited (PLD) Lead Zirconium Titanate (PZT) thin films is presented. The method involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. This study is uni...
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