Monolithic integrated-optic TDLAS sensors

We are developing prototype chip-scale low-power integrated-optic gas-phase chemical sensors based on infrared Tunable Diode Laser Absorption Spectroscopy (TDLAS). TDLAS is able to sense many gas phase chemicals with high sensitivity and selectivity. Using semiconductor fabrication and assembly techniques, the low-cost integrated optic TDLAS technology will permit mass production of sensors that have wide ranging industrial, medical, environmental, and consumer applications. Novel gas sensing elements using low-loss resonant photonic crystal cavities or waveguides will permit monolithic integration of a laser source, sampling elements, and detector on a semiconductor materials system substrate. Practical challenges to fabricating these devices include: a) selecting and designing the high-Q microresonator sensing element appropriate for the selected analyte; and b) device thermal management, especially stabilizing laser temperature with the precision needed for sensitive spectroscopic detection. In this paper, we analyze the expected sensitivity of micro-resonator-based structures for chemical sensing, and demonstrate a novel approach for exploiting laser waste heat to stabilize the laser temperature.