Measurements of Piezoelectric Coefficient d33 of Lead Zirconate Titanate Thin Films Using a Mini Force Hammer
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چکیده
s of 2007 Conference on Implantable Auditory Prostheses, July 15–20,
منابع مشابه
Effects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films
Lead zirconate titanate ~PZT! thin films with a Zr/Ti ratio of 52/48 were deposited on platinized silicon substrates by a sol-gel method and crystallized with preferred ~111! or ~100! orientation. Both the piezoelectric properties (d33) and the field-induced strains of the films with different thickness and preferred orientation were measured by a laser Doppler heterodyne interferometer. The we...
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This paper details an experimental investigation of the clamping effect associated with thick-film piezoelectric elements printed on a substrate. The clamping effect reduces the measured piezoelectric coefficient, d33, of the film. This reduction is due to the influence of the d31 component in the film when a deformation of the structure occurs, by either the direct or indirect piezoelectric ef...
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