Production Technology for Passivation of Polycrystalline Silicon Solar Cells
نویسندگان
چکیده
Techniques for cost-efficient operation of SiNx:H systems with a capability for hydrogen passivation in a manufacturing environment are analyzed. We conclude that SiNx:H performance may be optimized by a variety of techniques, and that the cost and productivity of the deposition tool may be the determining factors in the industry’s decision for a particular technique. PECVD constitutes the current benchmark. Dual magnetron reactive sputtering is a candidate to achieve industry acceptance.
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