Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography

Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role nowadays in the fabrication of microand nano-structures especially for the realization of micro-electro-mechanical systems (MEMS), microfluidic devices, photonic crystals, photonic integrated circuits, micro-optics, and plasmonic optoelectronic devices. These devices have various practical applications including optical display, optical memory, optical interconnection for high speed computing systems, photonic planar lightwave circuits, medical fluidic filtering devices, drug delivery devices, solar energy devices, antireflection optical elements, and optical sensors.