Chip-scale quadrupole mass filters for a Micro-Gas Analyzer
نویسنده
چکیده
In recent years, there has been a desire to scale down linear quadrupoles. The key advantages of this miniaturization are the portability it enables and the reduction of pump-power needed due to the relaxation on operational pressure. Various attempts at making MEMS-based linear quadrupoles have met with varying degrees of success [1]-[3]. Producing these devices involved some combination of precision machining or microfabrication followed by electrode assembly. For miniature quadrupole mass filters to be mass-produced cheaply and efficiently, the electrode assembly should be removed from the process.
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