Stability of droplet-target laser-plasma soft x-ray sources
نویسندگان
چکیده
The spatial stability of microscopic target droplets used for laser-plasma soft x-ray generation in vacuum is investigated. A long-term drift in drop position is characterized with an ultrafast laser-diode imaging system. The drift is experimentally and theoretically shown to be due to a temperature-induced increase in target-liquid viscosity as a result of evaporation. Finally, the drift is compensated for and stable, long-term unattended operation of the source is demonstrated with an automatic phase-delay drop-to-laser synchronizing system. This is important for future compact lithography and microscopy systems. © 2000 American Institute of Physics. @S0021-8979~00!00822-7#
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