The role of creep in the time-dependent resistance of Ohmic gold contacts in radio frequency microelectromechanical system devices
نویسندگان
چکیده
in radio frequency microelectromechanical system devices O. Rezvanian, C. Brown, M. A. Zikry, A. I. Kingon, J. Krim, D. L. Irving, and D. W. Brenner Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA Department of Physics, North Carolina State University, Raleigh, North Carolina 27695, USA Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695, USA
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