Set-up and characterization of a humidity sensor realized in LTCC-technology

A new type of integrated temperature and humidity sensor applying LTCC-technology (Low Temperature Cofired Ceramics) has been developed and characterized. The proposed device is based on the detection of the difference of thermal conductivity between water vapor and air. In this approach, sensing elements are implemented using heated metal resistors (Pt-elements), where one is exposed to the humid environment that causes the sensor element to cool down with increased humidity, while the other one is sealed from the environment. Sensor design is based on FEA (Finite Element Analyses) where the critical design parameters have been analyzed with regard to the performance characteristic of the device.