Modeling of Thermoelectric Effects in Planar Micromachined Structures Using SPICE
نویسندگان
چکیده
This paper presents an improved model for SPICE-based simulation of thermoelectric structures which includes circuit elements for simulating thermoelectric Peltier and Thomson effects, and shows greatly improved accuracy over previous models where those are neglected. The complete thermoelectric model is verified by comparing with experimental results on temperature distributions of suspended aluminum and polysilicon resistors and contacts. Near the contacts, temperature differences of up to 10% of highest temperature are found when changing current direction. This is closely matched in the presented simulations.
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