Self-assembly technique for MEMS vertical comb electrostatic actuator

نویسندگان

  • Keiji Isamoto
  • T. Makino
  • A. Moroswa
  • Chongho Chong
  • Hiroyuki Fujita
  • Hiroshi Toshiyoshi
چکیده

We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC has shown good electrostatic scanning performance of over 1.0-degree static-rotation angle with a typical drive voltage of 20V without any in-use electromechanical failure.

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عنوان ژورنال:
  • IEICE Electronic Express

دوره 2  شماره 

صفحات  -

تاریخ انتشار 2005