Effects of Process Conditions on Properties of Electroplated Ni Thin Films for Microsystem Applications
نویسندگان
چکیده
Effects of Process Conditions on Properties of Electroplated Ni Thin Films for Microsystem Applications J. K. Luo, M. Pritschow, A. J. Flewitt, S. M. Spearing,* N. A. Fleck, and W. I. Milne Department of Engineering, University of Cambridge, Cambridge CB3 0FA, United Kingdom Institute for Microelectronics Stuttgart, 70569 Stuttgart, Germany School of Engineering Science, University of Southampton, Southampton SO17 1QJ, United Kingdom
منابع مشابه
EFFECTS OF ALUMINIZING PARAMETERS ON THE MICROSTRUCTURE AND THICKNESS OF PT-ALUMINIDE COATING APPLIED ON A NI-BASE SUPERALLOY, GTD-111
In this research, effects of changes in aluminizing conditions on microstructure of Pt - aluminide coating applied oil a Ni - base superalloy GTD -111, has been studied. A thin layer (i.e.68,#mm ) of Pt was electroplated onto the surface of the .samples, and then they were aluminized by pack cementation technique under various conditions of time, temperature, rate of heating and pack powder com...
متن کاملDependence of Nanostructure and the Optical Properties of Ni Thin Films with Different Thicknesses on the Substrate Temperature
Nickel films with the thicknesses of 30 and 120 nm were deposited on glass substrates, at different substrate temperatures (313 to 600 K) under uhv condition. The nano-structure of the films and mean diameter of grains was obtained for each films using atomic force microscopy (AFM). Their optical properties were measured by spectrophotometry in the spectral range of 190-2500 nm. Kramers-Kronig ...
متن کاملDevelopment of all metal electrothermal actuator and its applications
Norman A. Fleck W. I. Milne University of Cambridge Department of Engineering Cambridge, CB2 1PZ United Kingdom Abstract. The in-plane motion of microelectrothermal actuator (‘‘heatuator’’) has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ;60% larger than that of a Si-based actuator under the same power cons...
متن کاملStudy of Composition and Optical Properties of Chemically Deposited Pd-xSb2S3 Thin Films
The study reports on the effects of different concentration of palladium impurities on the compositional and optical properties of Palladium Doped Antimony Sulphide (Pd-xSb2S3) thin films grown by the chemical bath deposition method. The films were grown at room temperature and other deposition conditions such as the bath temperature, pH, complexing agents were kept constant. The concentration ...
متن کاملSubstrate Effects on the Structural Properties of Thin Films of Lead Sulfide
Nanocrystalline PbS thin films are deposited on glass and alumina substratesthrough the chemical bath deposition technique by creating similar conditions, in orderto investigate the effects of the substrate. The structural and optical properties of PbSfilms are investigated by X-ray diffraction, scanning electron microscope, and UV–Vis.The structural analyses of the films indicate that they are...
متن کامل