Determination of Average Roughness and Profile Autocorrelation Width of Metallic Surfaces with a White Light Sensor

نویسندگان

  • K. LEONHARDT
  • E. KAUFMANN
چکیده

A new procedure to determine simultaneously a horizontal descriptor of the surface the autocorrelation width and the most important vertical descriptor the root-mean-square roughness is presented. It is based on the inversion of an analytic contrast formula. After a short introduction to white light random phase contrast measurement we describe the elimination process and show fist experimental verifications.

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تاریخ انتشار 2002