The formation of moulds for 3D microstructures using excimer laser ablation
نویسندگان
چکیده
Fabrication by the ‘Laser-LIGA’ process of three-dimensional structures for micro-fluidic devices is investigated. Polymer moulds are formed by projection ablation using an excimer laser operating at 248 nm wavelength. The moulds are replicated by electroforming — as in conventional X-ray LIGA — to produce fixed and freely moving nickel microturbine parts with heights of 150 lm, wall angles of 1.5° from vertical and surface roughnesses below 100 nm.
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