Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

نویسندگان

  • Yan Lindsay Sun
  • Ganhua Feng
  • George Georgiou
  • Edip Niver
  • Karen Noe
  • Ken Chin
چکیده

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry–Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor. r 2008 Elsevier Ltd. All rights reserved.

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عنوان ژورنال:
  • Microelectronics Journal

دوره 39  شماره 

صفحات  -

تاریخ انتشار 2008