Transducers Science and Technology - CLEMPS (Léon Woldering)
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چکیده
Within the Clemps project (Closed-Loop Embedded MEMS-based Precision Stage) we investigate the fabrication of MEMS-based stages with up to three degrees of freedom. These stages are to be used in, for example, transmission electron microscopy applications and probe based data storage. The project is a close cooperation with the MA group of IMPACT. The desired stages are characterized by a number of challenging demands, such as large strokes of tens of micrometers, high resolution and stability, high speed, and low power consumption. Furthermore, the presence of high-resolution thermal-or capacitive sensors enables closed-loop feedback for nanometer accurate positioning of the stages. Publications {php}readfile("
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Transducers Science and Technology - CLEMPS
Within the Clemps project (Closed-Loop Embedded MEMS-based Precision Stage) we investigate the fabrication of MEMS-based stages with up to three degrees of freedom. These stages are to be used in, for example, transmission electron microscopy applications and probe based data storage. The project is a close cooperation with the MA group of IMPACT. The desired stages are characterized by a numbe...
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Ultrasonic transducers play a significant role in generating and receiving the acoustic waves in ultrasonic flowmeters. Depending on the required accuracy, the ultrasonic transducers can be installed either in one pair or more in an ultrasonic flowmeter. The main part of an ultrasonic transducer is its piezoceramic element. In this work, four piezoceramic elements with different diameter to thi...
متن کاملImpact Analysis of Variation in Geometrical Features on Intrinsic Characteristics of Capacitive Micro-machined Ultrasonic Transducers
Capacitive Micro-machined Ultrasonic Transducers (CMUTs) are the ultrasonic devices which produce better features in contrast to piezoelectric transducers. The intrinsic parameter of CMUT varies with the variation in geometrical dimension of the device. The cavity height and the radius of the CMUT with circular membrane is varied in the lumped parallel plate model for its impact on the paramete...
متن کاملSignature of a three-dimensional photonic band gap observed on silicon inverse woodpile photonic crystals
Simon R. Huisman,1,* Rajesh V. Nair,1 Léon A. Woldering,1 Merel D. Leistikow,1,2 Allard P. Mosk,1 and Willem L. Vos1 1Complex Photonic Systems (COPS), MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands 2Center for Nanophotonics, FOM Institute for Atomic and Molecular Physics (AMOLF), Science Park 113, 1098 XG Amsterdam, The Netherlands (Rec...
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The problems of development of high-temperature ultrasonic transducers for modern science and technology applications are analysed. More than 10 piezoelectric materials suitable for operation at high temperatures are overviewed. It is shown that bismuth titanate based piezoelectric elements are most promisable. Bonding methods of piezoelectric elements to a protector and backing are discussed. ...
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