In-situ Quantitative Integrated Tribo-SPM Nano-Micro-Metrology
نویسندگان
چکیده
A novel quantitative nano+micro-tribometer with integrated SPM and optical microscope imaging has been developed to characterize numerous physical and mechanical properties of liquid and solid thin films and coatings, with in-situ monitoring their changes during micro and nano indentation, scratching, reciprocating, rotating and other tribology tests. Both the materials properties and surface topography can be assessed periodically during the tests. The integrated multi-sensing tribo-metrology is illustrated with two examples, of nanoindentation characterization of silicon wafer based coatings and micro-scratch characterization of diamond-like carbon coatings on magnetic media on the same instrument
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