Arbeitskreis »bildanalyse Und Mustererkennung Kaiserslautern« (bamek) Low Coherence Interferometric Imaging --coherence Probe Microscopy -- Spatial Light Modulators

نویسندگان

  • Bettina Heise
  • Verena Schlager
چکیده

»Bildanalyse und Mustererkennung Kaiserslautern« (BAMEK) lädt ein zu den Vorträgen von Low-coherence interferometric (LCI) imaging represents a well-established technique in the field of profilometry. White light interferometers find their usage in the daily routine for 3D inspection of components, enabling the survey of sample surfaces in the micron-range. By combining LCI technique with coherent light sources in the near infrared range leads to the field of Optical Coherence Tomography (OCT). By OCT techniques information can be obtained additionally in the sub-surface range of the sample. Switching from the raster scanning principle, as usually applied in conventional OCT, to a full-field imaging principle now allows to introduce microscopic imaging methods in LCI. This opens the field for Coherence Probe Microscopy. Similar to conventional microscopy, where different contrast modes e.g. bright and dark field, phase contrast, spiral phase contrast can be exploited, we have shown that a comparable contrast modification can also be achieved in LCI technique. In our CPM setup we have applied the principle of Fourier plane filtering by a 4f configuration. Within this configuration a spatial light modulator acts as an addressable electro-optical Fourier filter, which delivers, dependent on its addressing, a modified flexible contrast. However, the importance of SLMs should not only be restricted to contrast modification. For future, additional applications for SLMs may be found: multiplexed imaging, structured illumination, or beam shaping by SLMs should be noted as interesting perspective.

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تاریخ انتشار 2011