A Diameter Measuring System with Laser Interferometer
نویسندگان
چکیده
INTRODUCTION The diameter measurement of ring, plug and sphere is very important in dimensional metrology. The measurement of diameter is generally carried out by a comparison method using a ring gauge comparator. Recently the commercial comparators using laser interferometer or precision linear encoder were introduced. The accuracies of these instruments are larger than 0.5 μm. A laboratory uses the coordinate measuring machine cooperating a laser interferometer and a precision probe. It provides good performance but has a limitation on operation as coordinate measuring machine. However the comparison method requires a reference gauge block, which is traceable to meter unit. So this method is time-consuming due to wringing gauge block. And it is not accurate comparing to the absolute method. So several national metrology laboratories (NMLs) designed and fabricated their own equipment using a laser interferometer.[1,2]
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