A High-current Electrothermal Bistable Mems Relay
نویسندگان
چکیده
This paper reports the design, fabrication and testing of a thermally -actuated bistable MEMS relay. Mechanical bis tability ensures zero actuation power in both the on and off states, and permits actuation with a transient thermal actuator. In the off state, this relay stands off more than 200 V. In the on state, it exhibits a minimum total resistance of 60 mΩ and a maximum current carrying capacity of 3 A. It switches with a maximum 5 Hz rate.
منابع مشابه
An Electrothermally-Actuated Bistable MEMS Relay for Power Applications
This thesis first develops a bistable mechanism that does not rely on internal stress or hinges for its bistability, which is then combined with transient electrothermal actuation and contact structure to develop a MEMS relay for power switching. The relay components, fabricated by a through etch of a silicon wafer using deep reactive ion etch (DRIE), move laterally in the plane of the wafer. T...
متن کاملDesign and fabrication of a magnetic bi-stable electromagnetic MEMS relay
This paper describes the principles, design, fabrication and performance of a new type of electromagnetic bistable MEMS relay. The microdevice is operated by a wiggling microactuator, which is symmetrically assembled with two integrated planar windings and one permanent rotor in the form of sandwich with coaxial sustained gaps between each other. The micromachined rotor moves to-and-fro around ...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کاملLow power, high extinction electrothermal MEMS iris VOA
Electrothermal actuation provides the long displacement required by an increasing number of MEMS applications. However, its high power consumption is a limiting factor, especially for applications in which multiple actuators are required. An iris type variable optical attenuator (VOA), which was recently introduced by our group, is an example of such an application. In this paper we introduce a...
متن کامل