Optical Metrology Third Edition
نویسنده
چکیده
منابع مشابه
Analysis of Frequency Leakage in Different Optical Paths of Nano-Metrology Systems Based on Frequency-Path Models
The drawing of frequency-path (F-P) models of optical beams is an approach for nonlinearity analysis in nano-metrology systems and sensors based on the laser interferometers. In this paper, the frequency-path models of four nano-metrology laser interferometry systems are designed, analyzed and simulated, including ...
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A novel method capable of delivering relative optical path length metrology with nanometer precision is demonstrated. Unlike conventional dualwavelength metrology which employs heterodyne detection, the method developed in this work utilizes direct detection of interference fringes of two He-Ne lasers as well as a less precise stepper motor open-loop position control system to perform its measu...
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A method capable of delivering relative optical path length metrology with nanometer precision is demonstrated. Unlike conventional dual-wavelength metrology, which employs heterodyne detection, the method developed in this work utilizes direct detection of interference fringes of two He-Ne lasers as well as a less precise stepper motor open-loop position control system to perform its measureme...
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