Gas Sensor Design Using a Fabry-Perot Interferometer With Long Cavity Length As a Modulator
نویسندگان
چکیده
A gas sensor based on correlation spectroscopy using a FPI with long cavity length (>500 μm) as a modulator is presented. Eventually the FPI and the optical detector will be integrated within a MEMS structure. ©2005 Optical Society of America OCIS codes: (220.4830) Optical systems design; (120.4640) Optical instruments; (120.4570) Optical design of instruments
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