A Flexible 32x32 SPAD Image Sensor with Integrated Microlenses
نویسندگان
چکیده
The first single-photon avalanche diode (SPAD) image sensor fully integrated on flexible substrate is reported. The design consists of an array of 1024 quenched pixels with CMOS readout and addressing circuitries. The flexible substrate was made compatible with sol-gel polymer, which will be used to imprint microlenses by quartz mold to improve fill factor. The SPAD pixel can operate both in frontside(FSI) and backside-illumination (BSI) with similar peak photon detection probability (PDP) of 13%. The dark count rate (DCR) could be drastically reduced at a cryogenic temperature. Afterpulsing and cross-talk are negligible at the dead time.
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