Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold.

نویسندگان

  • Xinyuan Dou
  • Xiaolong Wang
  • Haiyu Huang
  • Xiaohui Lin
  • Duo Ding
  • David Z Pan
  • Ray T Chen
چکیده

In this paper, we presented fabrication of nickel based metal mold with 45 degrees tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45 degrees tilted angle, a 50microm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5 degrees . The polymeric waveguide array with 45 degrees micro-mirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.

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عنوان ژورنال:
  • Optics express

دوره 18 1  شماره 

صفحات  -

تاریخ انتشار 2010