Excimer Laser-Induced Ti Silicidation to Eliminate the Fine-Line Effect for Integrated Circuit Device Fabrication
نویسندگان
چکیده
In this paper laser thermal processing ~LTP! is applied to induce the Ti silicide formation in replacement of rapid thermal annealing ~RTA! in narrow lines. Results show that the C40 TiSi2 is synthesized after LTP in both large and small features. With this interfacial C40 TiSi2 , the C54 TiSi2-phase formation temperature can be lowered by 100°C during subsequent annealing. The C40-C54-phase transition is also achievable with low temperature treatment. Most importantly, the C54 TiSi2 growth is linewidth independent down to at least 0.25 mm using LTP followed by RTA. LTP provides a possible technique to extend the application of TiSi2 to subquartermicrometer technologies. © 2002 The Electrochemical Society. @DOI: 10.1149/1.1510843# All rights reserved.
منابع مشابه
308-nm excimer laser plus topical calcipotriol in the treatment of vitiligo; A single blind randomized clinical study
Background: There is a large variety of therapeutic agents for the treatment of vitiligo, but it still remains a challenge. Narrow-band UVB phototherapy and 308-nm excimer laser have been shown to be safe and effective for the treatment of vitiligo. Topical calcipotriol has recently been reported to enhance the efficacy of phototherapy, especially 8-methoxypsoralen plus UVA (PUVA). The goal of ...
متن کاملIntegration of multimode waveguides and micromirror couplers in printed circuit boards using laser ablation
Integration of optical interconnections on a Printed Circuit Board (PCB) is very challenging, as it should remain compatible with existing PCB manufacturing technology. We will describe the use of laser ablation, already used in PCB manufacturing for microvia’s, as a suitable technique for the fabrication of multimode waveguides and micromirrors to provide optical coupling. The focus is on abla...
متن کاملHard Magnetic Material for Perpendicular Magnetic Anisotropic Field in Electromagnetic Actuator Fabrication
This paper describes a high power electromagnetic microactuator fabrication method that combines the hard magnetic Fe/Pt process, Ni/Fe permalloy magnetic circuit design, bulk micromachining, and excimer laser ablation. The hard magnetic material Fe/Pt is deposited under low temperature less than 300◦C by sputter onto a suspension diaphragm to produce a perpendicular magnetic anisotropic field....
متن کاملSurface Modification of TIMETAL 834 by Excimer Pulse Laser
Ti alloys become very popular in various engineering fields due to its light weight, high strength and good corrosion resistance properties. Nevertheless, its application is limited in many areas like: tribology, high temperature oxidation and aggressive corrosion fields due to its poor surface properties. Therefore, the proper surface treatment is required to increase the usageof Ti alloys in ...
متن کاملThe 308-nm xenon chloride excimer laser in combination with topical calcipotriol in the treatment of vitiligo
Background: Treatment of vitiligo remains an attractive topic and several therapies with varying degrees of success have been used. The aim of this study was to find out whether the combination of topical calcipotriol and excimer laser increases the efficacy of therapy compared to excimer laser alone. Methods: Twenty eight patients in two groups were treated with 308nm excimer laser alone (14 p...
متن کامل