Precision machining and measurement of micro aspheric molds

Abstract –Demands of micro aspheric optical components such as lenses and mirrors are increasing for installing to the digital devices such as DVD, Digital camera, mobile phone and virtual reality system. As the devices become to be more compact and complicated, the molds shapes of lens and mirrors would become smaller and complicated, and then would become more difficult to be machined and measured. In this study, multi-axis controlled ultra precision machining/grinding/polishing and on-machine measurement technologies are developed for manufacturing of the complicated and micro molds. In this report, our developed grinding method of the complicated mold, ultrasonic vibration method and contact type of multi axis controlled on-machine measuring system are discussed.