Design and Fabrication of a Micro PZT Cantilever Array Actuator for Applications in Fluidic Systems
نویسندگان
چکیده
H y o n s e Kim School of Mechanical and Aerospace Engineering, Seoul National University. Shinlim-Dongo San 56-1, Kwanak-Gu. Seoul 151-742. Korea Chihyun In MEMS Division, DAEWO0 Electronics Corp., Kasan-dong, Kumchun-gu, Seou~ 153-801, South Korea Gilho Yoon Department of Mechanical Engineering. Solid Mechanics. Nils Koppels AtI~. DTU, Building 404. Office 131, DK-2800 Kgs. Lyngby, Denmark Jongwon Kim* School of Mechanical and Aerospace Engineering, Seoul National University. Shinlim-Dong, San 56-1, Kwanak-Gu, Seoul 151-742. Korea
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