Silane Safety in Amorphous Silicon and Silicon Nitride Operations
نویسندگان
چکیده
The PV industry is one of the fastest growing industries in Europe, the United States, and Japan. As PV manufacturing is scaled-up to meet a growing demand, preserving the safe, environmentally friendly nature of the industry becomes even more important. Silane is one of the inherently dangerous materials used in the deposition of silicon nitride (SiN3) and amorphous silicon (a-Si). In this paper, we review established methods for using this gas safely; they include risk-prevention strategies, passive and active protection systems, outdoor storage, and adequate buffer zones for bulk-silane installations.
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