2D PIC Simulation of the DC Discharge in Cylindrical Magnetron
نویسندگان
چکیده
PIC method of plasma simulation is widely used in plasma physics research because of its ability to solve wide range of problems in kinetic approach. Regarding to description of PIC method we refer to [Birdsall et al., 1995]. This work is focused on PIC simulations of dc discharge in cylindrical magnetron device. Magnetrons are used in industry e.g. for thin film layer coating and etching. Many magnetron configurations are used. In our research we concentrate on cylindrical magnetron device because its symmetry and simple magnetic field arrangement enables relatively simple theoretical description and makes understanding of processes in weakly magnetized plasma easier by avoiding effects of nonhomogenous magnetic field. We study the influence of the magnetic field on discharge parameters and the PIC model can contribute to its description.
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