Flow Characterization of a Piezo-Electric High Speed Valve
نویسندگان
چکیده
Injecting a gas into fusion reactors or semiconductor manufacturing systems, one has to quickly control the flow rate by a piezoelectric valve. In order to construct a gas injection system with high speed valves in the future, performance tests have been conducted on a commercial piezoelectric valve. An orifice flowmeter for measuring time average flowrate and a hot wire anemometer for instantaneous flowrate were manufactured. The total flow coefficient of the orifice flowmeter was obtained experimentally under a low pressure of a 10 -2 Pa and a low flowrate of a few mg/s, although they are smaller than the values specified by Japanese Industrial Standards. It is found that the hot wire anemometer installed downstream in the vicinity of the valve is suitable for detecting the change in flowrate with the response time of less than 1 ms.
منابع مشابه
Method of Green’s Function for Characterization of SH Waves in Porous-Piezo Composite Structure with a Point Source
An approach of Green’s function is adopted to solve the inhomogeneous linear differential equations representing wave equations in piezo-composite materials. In particular, transference of horizontally polarised shear (SH) waves is considered in bedded structure comprising of porous-piezo electric layer lying over a heterogeneous half-space. Propagation of SH-waves is considered to be influence...
متن کاملSimulation and investigation of the effect of oil flow rate, electric signal of flow control valve and controller on the performance of a wet clutch
The using of wet clutches and hydraulic control devices causes a smoothly torque transfer. In this study, a wet clutch was simulated in Simulink MATLAB software. Firstly the mechanical section of the clutch was modeled and then the hydraulic section was simulated with the addition of electric flow control valve and inlet and outlet of oil flow. Finally, the effects of oil flow rate, electric s...
متن کاملVortex and Oil Distribution of Oil-Water Annular Flow through Ball Valve
The study on the flow behave inside of a ball valve is important for heavy crude oil transportation. Owe to the fast progress of the numerical technique, it becomes an effective way to observe the flows inside a valve and to analyze the flow structure of the oil-water core annular flow. In the present study, the simulation of the oil-water core annular flowing through the valve is conducted...
متن کاملطراحی، ساخت و مشخصه یابی پله های فازی شیشه ای برای کاربرد در تداخل سنجی جابجایی فاز
In this paper, we report on the design and fabrication of a low-cost phase shifter for application in phase shifting interferometry. Phase shifting interferometry is a powerful method for surface characterization. It uses interference data recorded during a series of predetermined phase shifts to recover the induced phase by the object surface. These controlled phase shifts are typically perfor...
متن کاملSpeed Estimation of Adaptive Fuzzy-Controlled Piezo-Electric Motor using MLP-Neural Network
The speed of ultrasonic motor of piezo-electric type is usually measured using mechanical sensors such as pulse encoders. However, these sensors are costly and bulky. In this paper, a numerical speed estimation approach of a piezo-electric motor (PEM) is implemented using multilayer perception neural network (MLP-NN). The proposed model evaluates rotational speed and load torque based on the am...
متن کامل