Design and Simulation of MEMS Based Gyroscope

This paper represents a MEMS based gyroscope to measure orientation. Silicon-micro-machined gyro is fabricated on the basis of resonators and they use vibrating mechanical element to sense rotation. The vibratory measurement can be done by measuring the change in capacitance with respect to the voltage or force applied in particular axis. Here MEMS based gyroscope has been designed from Lame mode resonator which is a square plate. The additional benefits by using the gyroscope are lower sensor cost, power consumption, more robustness, higher shock resistance. In this paper, also sensitivity of the geometry and change of capacitance has been shown. Index Terms –Coriolis Force, Gyroscope, MEMS.