Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films

We present laser-induced forward transfer of solid-phase polymer films, shaped using a Digital Micromirror Device (DMD) as a variable illumination mask. Femtosecond laser pulses with a fluence of 200-380 mJ/cm at a wavelength of 800 nm from a Ti:sapphire amplifier were used to reproducibly transfer thin films of poly(methyl methacrylate) as small as ~30 μm by ~30 μm with thickness ~1.3 μm. This first demonstration of DMD-based solid-phase LIFT shows minimum feature sizes of ~10μm. ©2015 Optical Society of America OCIS codes: (140.3390) Laser materials processing; (240.0310) Thin films; (140.7090) Ultrafast lasers; (220.4000) Microstructure fabrication; (070.6120) Spatial light modulators. References and links 1. J. Bohandy, B. F. Kim, and F. J. Adrian, “Metal deposition from a supported metal film using an excimer laser,” J. Appl. Phys. 60(4), 1538–1539 (1986). 2. M. L. Tseng, P. C. Wu, S. Sun, C. M. Chang, W. T. Chen, C. H. Chu, P. L. Chen, L. Zhou, D. W. Huang, T. J. Yen, and D. P. 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