Method and apparatus for automatically re-igniting vacuum arc plasma source
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چکیده
An apparatus and method are disclosed whereby if the arc in a DC or long-pulse AC vacuum arc plasma process (eg in vacuum deposition) starts to extinguish, this is automatically detected and a reignition process is activated. Detection of a tendency for the arc to extinguish is detected by monitoring the main power supply voltage, which will increase if the arc is extinguished. References Cited [Referenced By] U.S. Patent Documents Primary Examiner: Hoang; Tu Ba Attorney, Agent or Firm: Heslin Rothenberg Farley & Mesiti P.C.
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