Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures.
نویسندگان
چکیده
We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.
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ورودعنوان ژورنال:
- Science
دوره 346 6215 شماره
صفحات -
تاریخ انتشار 2014