HOE for clock distribution in integrated circuits : Experimental results

نویسندگان

  • D. Prongué
  • H. P. Herzig
چکیده

This paper reports the design and fabrication of transmission holographic optical elements (HOEs) for clock distribution. First, we have studied and fabricated a multi-focus doublet HOE. The aberrations due to the wavelength shift between recording (= 488 nm) and reconstruction ( = 780 nm) have been minimized by an appropriate recording and readout geometry. The diffraction efficiency has been optimized by a copying technique. Second, we have investigated the near-field internal reflection (TIR) holographic recording technique to solve the problems of miniaturization. With this method, we have recorded a lOOxlOO lenlet array with focal lengths of f =400 jim.

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تاریخ انتشار 2004