Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides
نویسنده
چکیده
We propose a novel technique for microlens fabrication which is compatible with silicon oxynitride technology, and enables the collimation of light exiting the waveguides into beams with divergence angles of 0.52°. Keywords-arrayed microlenses; integrated optics; waveguides
منابع مشابه
Fabrication and characterization of compact silicon oxynitride waveguides on silicon chips
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